{"title":"高拉伸应变多量子阱激光二极管的应变相关退化","authors":"Bin Chen, Chentao Cao, Xianghui Che, Yulong Fang","doi":"10.1109/SSLChinaIFWS57942.2023.10071021","DOIUrl":null,"url":null,"abstract":"Incorporating strain in AlGaInAs multi-quantum well (MQW) active region is one of the key factors for achieving high performance laser diode for optical communication system. However, incorporating strain in thin film material may degrade the lattice or interface quality, which not only makes the crystal growth process challenging but also lead to gradual degradation behavior of optical device. In this work, four 1.3 um AlGaInAs laser diode epitaxial layers with different MQW strain compensation or growth parameter were fabricated by MOCVD. They were processed into ridge waveguide (RWG) laser diodes and burn-in test was carried out. By comparing the degradation behavior of the devices from the four wafers, it was concluded that strain compensation was the most important factor for achieving high reliability optical devices.","PeriodicalId":145298,"journal":{"name":"2022 19th China International Forum on Solid State Lighting & 2022 8th International Forum on Wide Bandgap Semiconductors (SSLCHINA: IFWS)","volume":"39 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-02-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Strain related degradation of highly tensile-strained multi-quantum well laser diodes\",\"authors\":\"Bin Chen, Chentao Cao, Xianghui Che, Yulong Fang\",\"doi\":\"10.1109/SSLChinaIFWS57942.2023.10071021\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Incorporating strain in AlGaInAs multi-quantum well (MQW) active region is one of the key factors for achieving high performance laser diode for optical communication system. However, incorporating strain in thin film material may degrade the lattice or interface quality, which not only makes the crystal growth process challenging but also lead to gradual degradation behavior of optical device. In this work, four 1.3 um AlGaInAs laser diode epitaxial layers with different MQW strain compensation or growth parameter were fabricated by MOCVD. They were processed into ridge waveguide (RWG) laser diodes and burn-in test was carried out. By comparing the degradation behavior of the devices from the four wafers, it was concluded that strain compensation was the most important factor for achieving high reliability optical devices.\",\"PeriodicalId\":145298,\"journal\":{\"name\":\"2022 19th China International Forum on Solid State Lighting & 2022 8th International Forum on Wide Bandgap Semiconductors (SSLCHINA: IFWS)\",\"volume\":\"39 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-02-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2022 19th China International Forum on Solid State Lighting & 2022 8th International Forum on Wide Bandgap Semiconductors (SSLCHINA: IFWS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SSLChinaIFWS57942.2023.10071021\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 19th China International Forum on Solid State Lighting & 2022 8th International Forum on Wide Bandgap Semiconductors (SSLCHINA: IFWS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SSLChinaIFWS57942.2023.10071021","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
摘要
在AlGaInAs多量子阱(MQW)有源区加入应变是实现光通信系统中高性能激光二极管的关键因素之一。然而,在薄膜材料中加入应变可能会降低晶格或界面质量,这不仅使晶体生长过程具有挑战性,而且会导致光学器件的逐渐退化行为。本文采用MOCVD法制备了4个具有不同MQW应变补偿或生长参数的1.3 um AlGaInAs激光二极管外延层。将其加工成脊波导(RWG)激光二极管,并进行了烧蚀试验。通过比较四种晶圆器件的退化特性,得出应变补偿是实现高可靠性光学器件的最重要因素。
Strain related degradation of highly tensile-strained multi-quantum well laser diodes
Incorporating strain in AlGaInAs multi-quantum well (MQW) active region is one of the key factors for achieving high performance laser diode for optical communication system. However, incorporating strain in thin film material may degrade the lattice or interface quality, which not only makes the crystal growth process challenging but also lead to gradual degradation behavior of optical device. In this work, four 1.3 um AlGaInAs laser diode epitaxial layers with different MQW strain compensation or growth parameter were fabricated by MOCVD. They were processed into ridge waveguide (RWG) laser diodes and burn-in test was carried out. By comparing the degradation behavior of the devices from the four wafers, it was concluded that strain compensation was the most important factor for achieving high reliability optical devices.