K. Seol, A. Ieki, Y. Ohki, H. Nishikawa, M. Takiyama
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Luminescence properties of defects in P/sup +/- or B/sup +/-implanted thermally grown silicon dioxide
In this paper, we report photoluminescence spectra from P/sup +/- or B/sup +/-implanted thermally grown SiO/sub 2/ films obtained by synchrotron radiation and an excimer laser, and discuss the nature of the defects induced by the ion implantation.
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