锥束计算机层析成像作为一种新的测试方法在工业上的应用

M. Danczak, K. Juergen-Wolter
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引用次数: 3

摘要

锥束计算机断层扫描(CT)是一种相对较新的无损检测方法,用于工业中,测量x射线的衰减系数。样品具有不同的密度和厚度的事实解释了为什么在最终结果中得到不同的对比。锥束CT使用体积光束扫描被测物体,从而获得一系列二维图像,这些图像被重建成三维模型。在重建过程中,x射线管发出多色光谱,称为光束硬化,通过这种方法通常可以创建人工制品。这一过程的发生是因为材料中的低能谱部分比高能谱部分更容易被吸收。该方法的基本应用是电子元件内外结构、封装和互连技术的可视化。本文介绍了CT的基本原理、典型的光束硬化伪像以及减少其对被测物体成像质量影响的方法。此外,还给出了该测试方法的实例。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Cone-beam computer tomography as a new testing method for industrial application
Cone-beam computer tomography (CT) is a relatively new nondestructive testing method, used in industry, where the attenuation coefficient of an X-ray is measured. The fact that the samples are characterized by different density and thickness explains why various contrasts are obtained in the end results. Cone-beam CT uses a volumetric beam to scan the test object and therefore obtains a series of 2D images which are reconstructed into a 3D model. During the reconstruction process, the X-ray tube emits a polychromatic spectrum, called beam hardening, by which artefacts are often created. This process takes place because the low energy spectrum part in the material is better absorbed than the higher energy one. The basic application of this method is the visualization of the inner and outer structures of electronic components, packaging and interconnection technologies. This paper describes the basics of CT, the typical beam hardening artefacts and method to reduce their influence on the imaging quality of the measured objects. Additionally, examples of this testing method are presented.
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