3D集成的机会、问题和解决方案:设计师的视角

Lithography Asia Pub Date : 2009-12-03 DOI:10.1117/12.845747
D. Kwai, Cheng-Wen Wu
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引用次数: 8

摘要

随着使用最先进技术的典型片上系统(SOC)的开发成本飙升,越来越多的人转向三维(3D)集成,寻求以更低成本提供更好或同等性能的可能替代方案。使用通硅通孔(TSV)技术的堆叠模具被认为是半导体行业中最有希望延长摩尔定律寿命的解决方案之一,但当然,在建立基础设施以支持行业制造基于TSV的3D集成器件之前,还有一些问题需要解决。在本文中,我们将从设计师的角度讨论3D集成设备的机会、设计和制造问题以及可能的解决方案。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
3D integration opportunities, issues, and solutions: a designer's perspective
As the development cost of a typical system-on-chip (SOC) using state-of-the-art technology soars, more and more people turn to three-dimensional (3D) integration for possible alternatives that provide better or equal performance with lower cost. Stacking dies using the through-silicon-via (TSV) technology has been considered one of the most promising solutions to extending the life of Moore's law in semiconductor industry, but of course there are problems to be solved before the infrastructure can be set up to support the industry for manufacturing TSV-based 3D integrated devices. In this paper we will discuss the opportunities, design and manufacturing issues, and possible solutions for 3D integrated devices, from a designer's perspective.
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