在3D基板上集成2D材料的挑战和机遇:材料和器件的观点

M. Neupane, D. Ruzmetov, R. Burke, A. G. Birdwell, Decarlos Taylor, M. Chin, T. O'Regan, F. Crowne, B. Nichols, P. Shah, E. Byrd, T. Ivanov
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引用次数: 2

摘要

近年来,对石墨烯和过渡金属二硫族化合物(TMDs)等半导体二维(2D)材料研究的大量投入,揭示了与器件相关的有趣物理现象,如谷电子学[1]、二维超导性[2]、二维激子效应[3]和垂直隧道[4]。tmd提供由层间范德华力(vdW)控制的电子和光电子特性的层依赖化学可调性[5]。由于它们的分层性质,这些低维材料可以组合形成多功能异质结构材料,展示出全新的物理系统,为设计电子、光电子和其他新型器件提供了新的灵活性[6],[7]。在过去的几年里,二维材料研究的重点已经从探索使用机械剥离材料的概念验证器件转向使用基于先进可扩展vdw外延技术(如粉末气相沉积(PVD)和化学气相沉积(CVD)的高质量大规模生长的更先进的器件加工。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Challenges and opportunities in integration of 2D materials on 3D substrates: Materials and device perspectives
In recent years, large investments into the research of semiconducting two-dimensional (2D) materials such as graphene and transition metal dichalcogenides (TMDs) have elucidated interesting device related physical phenomena such as valleytronics [1], 2D superconductivity [2], 2D excitonic effects [3] and vertical tunneling [4]. TMDs offer layer-dependent chemical tunability of electronic and optoelectronic properties governed by interlayer van der Waals (vdW) forces [5]. Because of their layered nature, these low-dimensional materials can be combined to form multifunctional heterostructure materials exhibiting entirely new physical systems offering new degrees of flexibility in designing electronics, optoelectronics and other novel devices [6], [7]. In the last couple of years, the focus in the 2D materials research have shifted from exploration of proof-of-concept devices using mechanically exfoliated materials to more advanced device processing using high-quality large-scale growth based on advanced scalable vdW-epitaxy techniques such as powder vapor deposition (PVD) and chemical vapor deposition (CVD).
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