C. Moldovan, R. Iosub, G. Nechifor, C. Radu, D. Bogdan, C. Flueraru, I. Cernic, R. Vasilco, I. Dinoiu
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The multichannel microprobe for recording/stimulation of neural/muscular activity, CMOS technology compatible
This paper presents the description, the technological steps, the specific process of fabrication of a multichannel microprobe for recording/stimulation the neural/muscular activity. Few problems of anisotropic etching are analyzed. The compatibility between the materials used in the semiconductor fabrication and the human body is analyzed. The final goal is the treatment of chronic pain in a closed loop scheme of electric recording and stimulation in the brain.
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