{"title":"用于极紫外和软x射线范围的光学元件","authors":"Martyna Wardzińska, P. Wachulak","doi":"10.5604/01.3001.0016.2808","DOIUrl":null,"url":null,"abstract":"The article presents the physical basis and overview of optical elements for the rangeincluding extreme ultraviolet (EUV) and soft X-ray (SXR). The first chapter contains an introductionto the subject under review and physical fundamentals. The second chapter presents the basics ofoptics for the EUV/SXR range, along with highlighting its advantages and disadvantages. The thirdchapter discusses in detail optical components such as optical filters, mirrors (including multilayers),diffraction gratings, Fresnel zone plates, and hybrid solutions. The fourth chapter presents a wide rangeof applications of EUV/SXR optics. The final chapter summarises the information presented earlier.Keywords: automation, electronic and electrical engineering, soft X-rays, extreme ultraviolet, opticalelements, optical filters, multilayer mirrors, diffraction gratings, Fresnel zone plates","PeriodicalId":232579,"journal":{"name":"Bulletin of the Military University of Technology","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-06-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Optical elements for the extreme ultraviolet and soft X-ray range\",\"authors\":\"Martyna Wardzińska, P. Wachulak\",\"doi\":\"10.5604/01.3001.0016.2808\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The article presents the physical basis and overview of optical elements for the rangeincluding extreme ultraviolet (EUV) and soft X-ray (SXR). The first chapter contains an introductionto the subject under review and physical fundamentals. The second chapter presents the basics ofoptics for the EUV/SXR range, along with highlighting its advantages and disadvantages. The thirdchapter discusses in detail optical components such as optical filters, mirrors (including multilayers),diffraction gratings, Fresnel zone plates, and hybrid solutions. The fourth chapter presents a wide rangeof applications of EUV/SXR optics. The final chapter summarises the information presented earlier.Keywords: automation, electronic and electrical engineering, soft X-rays, extreme ultraviolet, opticalelements, optical filters, multilayer mirrors, diffraction gratings, Fresnel zone plates\",\"PeriodicalId\":232579,\"journal\":{\"name\":\"Bulletin of the Military University of Technology\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-06-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Bulletin of the Military University of Technology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.5604/01.3001.0016.2808\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Bulletin of the Military University of Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.5604/01.3001.0016.2808","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Optical elements for the extreme ultraviolet and soft X-ray range
The article presents the physical basis and overview of optical elements for the rangeincluding extreme ultraviolet (EUV) and soft X-ray (SXR). The first chapter contains an introductionto the subject under review and physical fundamentals. The second chapter presents the basics ofoptics for the EUV/SXR range, along with highlighting its advantages and disadvantages. The thirdchapter discusses in detail optical components such as optical filters, mirrors (including multilayers),diffraction gratings, Fresnel zone plates, and hybrid solutions. The fourth chapter presents a wide rangeof applications of EUV/SXR optics. The final chapter summarises the information presented earlier.Keywords: automation, electronic and electrical engineering, soft X-rays, extreme ultraviolet, opticalelements, optical filters, multilayer mirrors, diffraction gratings, Fresnel zone plates
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