{"title":"缩放对线后端处理的影响","authors":"P. Verdonck, Christopher J. Wilson, L. Wen","doi":"10.1109/SBMICRO.2014.6940080","DOIUrl":null,"url":null,"abstract":"Back End of Line Processing has an ever increasing impact on the whole of integrated circuit manufacturing. Its influence on the delay of the signals is already for some nodes higher than the Front End of Line Processes. Besides, for the more advanced nodes, the back end cost will be as high or higher than the front end cost. The technological challenges are ever more difficult to meet, the red brick wall looms for different unit processes. In this paper, we'll review some of the most interesting issues that scaling is causing to Back End Of Line processing.","PeriodicalId":244987,"journal":{"name":"2014 29th Symposium on Microelectronics Technology and Devices (SBMicro)","volume":"34 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"The effects of scaling on Back End of Line Processing\",\"authors\":\"P. Verdonck, Christopher J. Wilson, L. Wen\",\"doi\":\"10.1109/SBMICRO.2014.6940080\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Back End of Line Processing has an ever increasing impact on the whole of integrated circuit manufacturing. Its influence on the delay of the signals is already for some nodes higher than the Front End of Line Processes. Besides, for the more advanced nodes, the back end cost will be as high or higher than the front end cost. The technological challenges are ever more difficult to meet, the red brick wall looms for different unit processes. In this paper, we'll review some of the most interesting issues that scaling is causing to Back End Of Line processing.\",\"PeriodicalId\":244987,\"journal\":{\"name\":\"2014 29th Symposium on Microelectronics Technology and Devices (SBMicro)\",\"volume\":\"34 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2014-10-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2014 29th Symposium on Microelectronics Technology and Devices (SBMicro)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SBMICRO.2014.6940080\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 29th Symposium on Microelectronics Technology and Devices (SBMicro)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SBMICRO.2014.6940080","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
The effects of scaling on Back End of Line Processing
Back End of Line Processing has an ever increasing impact on the whole of integrated circuit manufacturing. Its influence on the delay of the signals is already for some nodes higher than the Front End of Line Processes. Besides, for the more advanced nodes, the back end cost will be as high or higher than the front end cost. The technological challenges are ever more difficult to meet, the red brick wall looms for different unit processes. In this paper, we'll review some of the most interesting issues that scaling is causing to Back End Of Line processing.
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