{"title":"六角形微悬臂红外成像传感器","authors":"Hesham H. Gaber, H. Elsemary, H.H. Ali","doi":"10.1109/ICM.2009.5418605","DOIUrl":null,"url":null,"abstract":"This paper is an analytical study for a new design microcantilever based IR (Infra Red) sensor. Using hexagonal structure increases energy absorbed, and is useful for the imaging processing after that due to using hexagonal coordinates. Fill factor is also one of the most properties improved in this design. Bimaterial microcantilever is used as a mechanical sensor which is deflected based on the mismatch between the two thermal expansions for the materials used. Maximizing deflection is analyzed and computed NETDTF (Noise Equivalent Temperature Difference) calculated as low as 2.5 mK which proof the good performance of the proposed sensor.","PeriodicalId":391668,"journal":{"name":"2009 International Conference on Microelectronics - ICM","volume":"38 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Hexagonal shaped microcantilever based IR imaging sensor\",\"authors\":\"Hesham H. Gaber, H. Elsemary, H.H. Ali\",\"doi\":\"10.1109/ICM.2009.5418605\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper is an analytical study for a new design microcantilever based IR (Infra Red) sensor. Using hexagonal structure increases energy absorbed, and is useful for the imaging processing after that due to using hexagonal coordinates. Fill factor is also one of the most properties improved in this design. Bimaterial microcantilever is used as a mechanical sensor which is deflected based on the mismatch between the two thermal expansions for the materials used. Maximizing deflection is analyzed and computed NETDTF (Noise Equivalent Temperature Difference) calculated as low as 2.5 mK which proof the good performance of the proposed sensor.\",\"PeriodicalId\":391668,\"journal\":{\"name\":\"2009 International Conference on Microelectronics - ICM\",\"volume\":\"38 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2009-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2009 International Conference on Microelectronics - ICM\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICM.2009.5418605\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 International Conference on Microelectronics - ICM","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICM.2009.5418605","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Hexagonal shaped microcantilever based IR imaging sensor
This paper is an analytical study for a new design microcantilever based IR (Infra Red) sensor. Using hexagonal structure increases energy absorbed, and is useful for the imaging processing after that due to using hexagonal coordinates. Fill factor is also one of the most properties improved in this design. Bimaterial microcantilever is used as a mechanical sensor which is deflected based on the mismatch between the two thermal expansions for the materials used. Maximizing deflection is analyzed and computed NETDTF (Noise Equivalent Temperature Difference) calculated as low as 2.5 mK which proof the good performance of the proposed sensor.
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