激光诱导偏转技术测量熔融二氧化硅在193nm处的初始吸收

D. Schönfeld, U. Klett, C. Mühlig, S. Thomas
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引用次数: 7

摘要

随着微光刻技术不断向结构小型化方向发展,对光学性能接近理想的透镜材料产生了强烈的需求。除了对均匀性和应力诱导双折射(SIB)有很高的要求外,低吸收是一个关键因素。即使很小的吸收也与温度升高有关,并导致热诱导的折射率和SIB的局部变化。这可能会影响光刻工艺的可实现分辨率。材料的总吸收由初始吸收和辐照过程中引起的吸收组成。因此,两者的优化提高了材料的使用寿命。原则上,用合适的光谱仪组件测量透射和散射并计算它们的吸收是可能的。然而,由于样品表面和测量误差的影响,这些方法通常不能提供令人满意的高透光性熔融二氧化硅的结果。因此,最理想的是找到一种能够直接测量(1…10)•10-4 cm-1(基底10)范围内吸收系数的技术。我们报告了用LID技术获得的熔融二氧化硅的第一个结果。除了为193nm应用设计的熔融硅级外,还测量了193nm吸收更高的等级来测试LID技术。特别关注在不受降解效应影响的情况下测量初始吸收的可能性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Measurement of initial absorption of fused silica at 193nm using laser induced deflection technique (LID)
The ongoing development in microlithography towards further miniaturization of structures creates a strong demand for lens material with nearly ideal optical properties. Beside the highly demanding requirements on homogeneity and stress induced birefringence (SIB), low absorption is a key factor. Even a small absorption is associated with a temperature increase and results in thermally induced local variations of refractive index and SIB. This could affect the achievable resolution of the lithographic process. The total absorption of the material is composed of initial absorption and of absorption induced during irradiation. Thus, the optimization of both improves the lifetime of the material. In principal, it is possible to measure transmission and scattering with a suitable spectrometer assembly and calculate absorption from them. However, owing to the influence of sample surfaces and errors of measurement, these methods usually do not provide satisfactory results for highly light-transmissive fused silica. Therefore, it is most desirable to find a technique that is capable of directly measuring absorption coefficients in the range of (1...10)•10-4 cm-1 (base 10) directly. We report our first results for fused silica achieved with the LID technique. Besides a fused silica grade designed for 193 nm applications, grades with higher absorption at 193 nm were measured to test the LID technique. A special focus was set on the possibility of measuring initial absorption without the influence of degradation effects.
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