探针几何形状对静电探针响应的影响

T. Johansson, G. Crichton, I. W. McAllister
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引用次数: 8

摘要

参考探针的几何形状,对静电探针的响应进行了研究。该研究涉及对探针/spl lambda/函数的评估,从中可以推导出与响应相关的特征参数。这些参数使探针的探测灵敏度S/sub e/和空间选择性S/sub p/得到定性评价。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Influence of probe geometry on the response of an electrostatic probe
The response of an electrostatic probe is examined with reference to the probe geometry. The study involves the evaluation of the probe /spl lambda/ function, from which response-related characteristic parameters can be derived. These parameters enable the probe detection sensitivity S/sub e/ and spatial selectivity S/sub p/ to be qualitatively assessed.
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