利用光子模式直接评价光子晶体板的空间分辨光学特性

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics Pub Date : 2008-08-26 DOI:10.1109/OMEMS.2008.4607854

Y. Nazirizadeh, U. Geyer, U. Lemmer, M. Gerken

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引用次数: 3

摘要

透射测量与交叉偏振滤波器进行了共聚焦显微镜设置的空间分辨评价光子晶体模式。研究了电子束光刻和激光干涉光刻制备样品的均匀性。

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Spatially resolved optical characterization of photonic crystal slabs using direct evaluation of photonic modes

Transmission measurements with crossed polarization filters are performed in a confocal microscope setup for spatially resolved evaluation of photonic crystal modes. The homogeneity of samples fabricated with electron-beam lithography and laser interference lithography is investigated.

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来源期刊

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics

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