[S]/ [In] = 3喷雾热解制备In2S3薄膜及表征

T. Sall, B. Hartiti, B. Marí, M. Miquel, L. Laânab, M. Fahoume
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引用次数: 9

摘要

利用硫铟比([S]/[In])为3,不同的基片温度,采用喷雾热解法在玻璃基片上制备了In2S3薄膜。采用x射线衍射(XRD)对沉积膜和退火膜进行了结构表征,能量色散光谱(EDS)对成分进行了表征,拉曼光谱对样品质量进行了表征,光学透射率对间隙能进行了测量。XRD分析表明,β-In2S3相沿(0 0 12)面具有优先取向。在EDS测量中发现了良好的化学计量学。拉曼光谱分析表明,退火后的β-In2S3薄膜具有明显的活性模式。这证实了所有薄膜的结构结晶度都有所提高,光学分析表明退火后的间隙能有所降低。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Elaboration and characterization of In2S3 thin films by spray pyrolysis with [S]/ [In] = 3 ratio
In2S3 thin films were elaborated onto glass substrate by spray pyrolysis method using sulphur-to-indium ratio ([S]/[In]) of 3 and different substrate temperatures. The as-deposited and annealing films were characterized by X-Ray Diffraction (XRD) for the structural, Energy Dispersive Spectroscopy (EDS) for the composition, Raman spectroscopy for samples quality and optical transmittance to measure gap energy. XRD revealed a β-In2S3 phase with a preferential orientation along (0 0 12) plane. Good stoichiometry was noticed in EDS measurement. Raman spectroscopy analysis shows a prominent of active modes of β-In2S3 films with annealing. This is confirming an improvement of structure cristallinity of all films and optical analysis shows a decrease of gap energy after annealing.
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