基于SGFET频率响应的pH传感

2011 IEEE SENSORS Proceedings Pub Date : 2011-10-28 DOI:10.1109/ICSENS.2011.6127353

A. Kherrat, F. le Bihan, E. Jacques, M. Thomas, O. de Sagazan, S. Crand, T. Mohammed‐Brahim, F. Razan

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引用次数: 3

摘要

本文介绍了悬浮栅场效应晶体管(SGFET)作为高灵敏度pH传感器。该装置以动态模式表征。增益，测量频率，研究了不同的pH值和显示共振频率取决于pH值。这些结果，通过不同几何形状的SGFET获得，为开发新的微系统提供了机会，CMOS兼容，对pH值高度敏感。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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pH sensing from frequency response of SGFET

This paper presents suspended gate field effect transistors (SGFET) used as highly sensitive pH sensors. The devices are there characterized in dynamic mode. The gain, measured versus frequency, is studied for different pH values and shows a resonance frequency depending on the pH value. These results, obtained with different geometries of SGFET, give an opportunity to develop new microsystems, CMOS compatible, highly sensitive to pH.

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2011 IEEE SENSORS Proceedings

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