基于混合模式TCAD senaurus的深沟终端二极管(DT2)仿真新方法

2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems Pub Date : 2015-04-19 DOI:10.1109/EUROSIME.2015.7103122

F. Baccar, H. Arbess, L. Théolier, S. Azzopardi, E. Woirgard

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引用次数: 2

摘要

本文提出了一种使用TCAD Sentaurus进行混合模式仿真的方法，在不增加节点数量和计算时间的情况下，对深沟终端二极管(DT2)的表示进行建模、分析和优化。此外，还解决了许多模拟中存在的收敛性问题。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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New simulation method for Deep Trench Termination diode (DT2) using mixed-mode TCAD sentaurus

This work presents a methodology using mixed-mode simulation with TCAD Sentaurus to model, analyze, and optimize the representation of the Deep Trench Termination Diode (DT2) without increasing the number of nodes and the computation time. Moreover, several convergence problems which can be found for many kinds of simulations have been resolved.

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来源期刊

2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems

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