Experimental study of particle deposition on thermal gas flow sensor

To study the deposition of particles on chip surface during the work of the thermal gas flow sensor, the paper analyzes deposition mechanism in depth by experiments to provide theoretical basis for reducing or avoiding particle deposition. The affecting factors of particle deposition such as electric field, the direction of sensor chip placement have been studied by monitoring the accuracy of flow sensor and the thickness of particle deposition on chip surface. The results show that the presence of electric field exacerbates the deposition of particles and the weight of particles has no significant effect on particle deposition.