新型MEMS全差分电容式传感器的设计与分析

2011 4th International Conference on Mechatronics (ICOM) Pub Date : 2011-05-17 DOI:10.1109/ICOM.2011.5937152

M. Ya, Sheroz Khan, A. Nordin, K. Al-Khateeb, Muhammad Islam, A. Naji

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引用次数: 1

摘要

本文详细介绍了一种新型MEMS全差分电容式传感器的设计和分析，该传感器可用于测量与力变化有关的参数，如压力或加速度。该MEMS模型采用了一种新的结构，可获得11.6fF/KPa的极高分辨率。此外，当电容的变化作为力变化的函数时，它具有良好的线性水平。

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Novel MEMS fully differential capacitive transducer design and analysis

This paper details the design and analysis of a novel MEMS fully differential capacitive sensor which can be used to measure the parameter related to force changes, such as pressure or acceleration. This MEMS model uses a new structure to get extremely high resolution of 11.6fF/KPa. Further it has a good level of linearity as regard changes in capacitance as a function of force change.

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2011 4th International Conference on Mechatronics (ICOM)

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