A. Haberli, M. Schneider, P. Malcovati, R. Castagnetti, F. Maloberti, H. Baltes
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2D magnetic microsensor with on-chip signal processing for contactless angle measurement
This microsystem is the key element for accurate contactless angle measurements in combination with a permanent magnet. The system is based on a novel approach for signal processing using an on-board incremental ADC and a two-dimensional (2D) magnetic microsensor allowing 1/spl deg/ resolution. The system can be used for various wear-free angular positioning control systems in industrial and automotive applications.