带有片上信号处理的二维磁微传感器,用于非接触角度测量

A. Haberli, M. Schneider, P. Malcovati, R. Castagnetti, F. Maloberti, H. Baltes
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引用次数: 26

摘要

该微系统是与永磁体相结合的精确非接触式角度测量的关键元件。该系统基于一种新颖的信号处理方法,使用板载增量ADC和二维(2D)磁微传感器,分辨率为1/声压度/。该系统可用于工业和汽车应用中的各种无磨损角定位控制系统。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
2D magnetic microsensor with on-chip signal processing for contactless angle measurement
This microsystem is the key element for accurate contactless angle measurements in combination with a permanent magnet. The system is based on a novel approach for signal processing using an on-board incremental ADC and a two-dimensional (2D) magnetic microsensor allowing 1/spl deg/ resolution. The system can be used for various wear-free angular positioning control systems in industrial and automotive applications.
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