倒装芯片级封装铜柱互连应力的有限元分析

Amirul Afripin, B. Carpenter, T. Hauck
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引用次数: 1

摘要

当前的电子设备和特征尺寸正变得越来越小、越来越轻,对电气性能的要求也越来越高。对于倒装芯片器件,铜柱技术可以减小间距和减小封装尺寸,并具有良好的电气性能。铜柱互连需要开发可靠的互连,包括许多设计特征,如:模具厚度,下填充材料和基板设计。增强的设计需要避免与封装翘曲、芯片背面应力、低k介电开裂(在芯片连接和温度循环期间)、焊点可靠性和电迁移故障相关的问题。本文通过对铜柱互连和封装设计的有限元建模进行力学仿真,以帮助设计选择过程提高封装在热机械载荷条件下的可靠性。模拟采用整体模型中铜柱和附模区下填材料的均质化特性来确定应力。评估了两种失效模式:a)模具脆性断裂和b) Al垫/模具界面分层。结果表明,较薄的Si模具比较厚的300um模具脆性开裂的风险更低。使用具有较高热膨胀系数(CTE)的模具复合材料可以降低铝垫的分层风险。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Finite Element Analysis of Copper Pillar Interconnect Stress of Flip-chip Chip-Scale Package
Current electronic devices and features sizes are becoming smaller, lighter, with ever-increasing electrical performance requirements. For flip chip devices, Cu-pillar technology enables reduced pitch and reduced package size with good electrical performance. Cu-pillar interconnects require the development of reliable interconnects including many design features such as: die thickness, underfill materials, and substrate design. The enhanced design is needed to avoid issues associated with package warpage, die backside stress, low-k dielectric cracking (during chip attach and temperature cycling), solder joint reliability, and electromigration failure. This paper presents mechanical simulation through finite element modeling of Cu-pillar interconnects and package designs to help the design selection process to improve the reliability of the package under thermal-mechanical loading conditions. The simulation uses a technique of homogenized properties of the Cu-pillar and the underfill material in the die-attach area in the global model to determine stresses. Two failure modes were assessed: a) Brittle fracture of the die and b) Interface delamination between Al pad/die interface. Results show that a thinner Si die has a lower risk of brittle crack compared to the thicker die of 300um. The use of mold compound with higher coefficient of thermal expansion (CTE) reduces delamination risk of the Al pad.
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