用于微对准的3d打印单片柔性Tip-tilt-z平台研究

2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2022-08-08 DOI:10.1109/3M-NANO56083.2022.9941606

Huaxian Wei, Jian Yang, Yuanchao Li, Zhouwu Chen

{"title":"用于微对准的3d打印单片柔性Tip-tilt-z平台研究","authors":"Huaxian Wei, Jian Yang, Yuanchao Li, Zhouwu Chen","doi":"10.1109/3M-NANO56083.2022.9941606","DOIUrl":null,"url":null,"abstract":"Tip-tilt-z micro-positioning is crucial in wafer alignment. Due to the restrain of traditional manufacturing technique, it is hard to development compliant tip-tilt-z (CTTZ) mechanism in the form of single-piece monolithic structure. This paper presents the design, fabrication, and experimental tests of a CTTZ stage with monolithic spatial structure based on additive manufacturing (3D printing). The results verified the feasibility of developing complex compliant mechanism with spatial, compact, and monolithic structure, which could realize precision capability up to submicron and micro-radian using easy-access 3D-printing.","PeriodicalId":370631,"journal":{"name":"2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"24 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-08-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Study of a 3D-printed Monolithic Compliant Tip-tilt-z Stage for Micro-alignment\",\"authors\":\"Huaxian Wei, Jian Yang, Yuanchao Li, Zhouwu Chen\",\"doi\":\"10.1109/3M-NANO56083.2022.9941606\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Tip-tilt-z micro-positioning is crucial in wafer alignment. Due to the restrain of traditional manufacturing technique, it is hard to development compliant tip-tilt-z (CTTZ) mechanism in the form of single-piece monolithic structure. This paper presents the design, fabrication, and experimental tests of a CTTZ stage with monolithic spatial structure based on additive manufacturing (3D printing). The results verified the feasibility of developing complex compliant mechanism with spatial, compact, and monolithic structure, which could realize precision capability up to submicron and micro-radian using easy-access 3D-printing.\",\"PeriodicalId\":370631,\"journal\":{\"name\":\"2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)\",\"volume\":\"24 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-08-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/3M-NANO56083.2022.9941606\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/3M-NANO56083.2022.9941606","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

尖端-倾斜-z微定位是晶圆对准的关键。由于传统制造工艺的限制，很难研制出单片整体式的柔性tip-tilt-z机构。本文介绍了基于增材制造(3D打印)的整体空间结构CTTZ舞台的设计、制造和实验测试。研究结果验证了开发具有空间、紧凑和整体结构的复杂柔性机构的可行性，该机构可以实现亚微米和微弧度的精度。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Study of a 3D-printed Monolithic Compliant Tip-tilt-z Stage for Micro-alignment

Tip-tilt-z micro-positioning is crucial in wafer alignment. Due to the restrain of traditional manufacturing technique, it is hard to development compliant tip-tilt-z (CTTZ) mechanism in the form of single-piece monolithic structure. This paper presents the design, fabrication, and experimental tests of a CTTZ stage with monolithic spatial structure based on additive manufacturing (3D printing). The results verified the feasibility of developing complex compliant mechanism with spatial, compact, and monolithic structure, which could realize precision capability up to submicron and micro-radian using easy-access 3D-printing.

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2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)

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