单质量3轴聚合物MEMS加速度计的动态特性和压阻分析

2019 IEEE International Conference on Design & Test of Integrated Micro & Nano-Systems (DTS) Pub Date : 2019-04-01 DOI:10.1109/DTSS.2019.8915018

Awatef Khlifi, B. Mezghani, F. Tounsi, Aftab Ahmed, S. Pandit, Rajul S. Patkar, P. Dixit, M. Baghini

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引用次数: 2

摘要

在这项工作中，首次提出了基于SU-8聚合物的单proof质量的3轴MEMS压阻式加速度计的动态行为。梁的尺寸进行了优化，以诱导施加加速度为100g的最大应力。多晶硅被用作压阻材料，以了解灵敏度并推断出器件的测量因子。采用有限元建模方法模拟了挤压膜阻尼的动力特性、频率响应和效应。然后验证了频率响应和动态分析。前三种模式的特征频率分别为1.0847 kHz、1.5067 kHz和1.5073 kHz。由频率响应推断出的质量因子约为15。最大规范系数为11.2。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Dynamic Behaviour and Piezoresistive Analysis of a Single Mass 3-Axis Polymer MEMS Accelerometer

In this work, for the first-time dynamic behavior of an SU-8 polymer based single proof mass, 3-axis MEMS piezoresistive accelerometer is presented. The beams dimensions were optimized to induce the maximum stress with an applied acceleration of 100g. Polysilicon is used as a piezoresistive material to understand the sensitivity and deduce the gauge factor of the device. Finite Element Modeling analysis is used to simulate the dynamic behavior, frequency response and effects of squeeze-film damping. Frequency response and dynamic analysis are then validated. The Eigen frequencies for the first three modes were found to be 1.0847 kHz, 1.5067 kHz and 1.5073 kHz, respectively. The quality factor deduced from the frequency response is approximately 15. The maximum gauge factor is found to be 11.2.

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2019 IEEE International Conference on Design & Test of Integrated Micro & Nano-Systems (DTS)

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