用于MCM-Si技术的高Q电感器

Proceedings 1997 IEEE Multi-Chip Module Conference Pub Date : 1997-02-04 DOI:10.1109/MCMC.1997.569342

N. Klemmer, J. Hartung

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引用次数: 13

摘要

在多芯片模块(MCM)技术中，用于微波应用的螺旋电感器已经集成在硅衬底上。所制造的电感器的质量因数高达23。据作者所知，这是迄今为止报道的硅上电感器的最高值。开发了一种用于平面螺旋电感快速、精确设计的软件工具。

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High Q inductors for MCM-Si technology

Spiral inductors for microwave applications have been integrated on a silicon substrate in Multi Chip Module (MCM) technology. The fabricated inductors exhibit quality factors of up to 23. To the authors knowledge, these are the highest values for inductors on silicon reported so far. A software tool has been developed for fast and accurate design of planar spiral inductors.

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来源期刊

Proceedings 1997 IEEE Multi-Chip Module Conference

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