基于还原氧化石墨烯薄膜的光敏场效应晶体管

I. Olenych, L. Monastyrskii
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引用次数: 0

摘要

通过在硅衬底的SiO2层表面沉积还原氧化石墨烯(rGO)薄膜,制备了光敏石墨烯场效应晶体管,硅衬底既是光敏介质又是场效应晶体管栅极。研究了基于氧化石墨烯薄膜的场效应晶体管在直流和交流模式下的电学和光电性能。通过分析所得场效应晶体管的开关特性,得到了漏极电流与栅极电压的线性关系,以及rGO薄膜电导率的电子元件与白光辐照的显著关系。结果表明,在102 ~ 105 Hz范围内,石墨烯场效应晶体管导电通道的内阻在光诱导下减小,电容在光诱导下增大。得到的场效应晶体管对红外、可见光和紫外光脉冲的光响应时间约为1.5 ms。所得结果可用于简化基于石墨烯的光电探测器的制造工艺。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
PHOTOSENSITIVE FIELD-EFFECT TRANSISTOR BASED ON REDUCED GRAPHENE OXIDE FILM
A photosensitive graphene field-effect transistor was created by depositing a reduced graphene oxide (rGO) film on the surface of the SiO2 layer on a silicon substrate, which serves as both a photosensitive medium and the field-effect transistor gate. The electrical and photoelectric properties of the field-effect transistor based on the rGO film were studied in DC and AC modes. Linear sections of the drain current on the gate voltage dependence and significant dependence of the electronic component of the rGO film conductivity on the irradiation with white light were revealed based on the analysis of the switching characteristics of the obtained field-effect transistor. A photoinduced decrease in the internal resistance and an increase in the capacitance of the conducting channel of the graphene field-effect transistor in the range of 102–105 Hz were revealed. It has been established that the photoresponse time of the obtained field-effect transistor to light pulses of IR, visible, and UV radiation is about 1.5 ms. The obtained results can be used to simplify the technology of manufacturing photodetectors based on graphene.
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