{"title":"基于SIL测量的CMOS电路皮秒成像电路分析","authors":"S. Lin, Frank Yong","doi":"10.1109/CSTIC52283.2021.9461429","DOIUrl":null,"url":null,"abstract":"As a process node is getting smaller, the types of failure mechanisms are increasing. New EFA technologies and methods are constantly development. One of the main changes EFA analyses is an enhancement of dynamic EFA in circuit failed in functional test. We propose a technique for advanced Electrical Failure Analysis (EFA) tool with a Picosecond Imaging Circuit Analysis (PICA) detector with enhanced sensitivity for discussing Time Resolved Emission (TRE). The key applications where the time-resolved imaging capability is very effective in reducing the debug time and improving the understanding the failure behaviors of VLSI chip for fault characteristics, especially the use of SIL(Solid Immersion Lens).","PeriodicalId":186529,"journal":{"name":"2021 China Semiconductor Technology International Conference (CSTIC)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-03-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Picosecond Imaging Circuit Analysis of CMOS Circuits Using SIL Measurement\",\"authors\":\"S. Lin, Frank Yong\",\"doi\":\"10.1109/CSTIC52283.2021.9461429\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"As a process node is getting smaller, the types of failure mechanisms are increasing. New EFA technologies and methods are constantly development. One of the main changes EFA analyses is an enhancement of dynamic EFA in circuit failed in functional test. We propose a technique for advanced Electrical Failure Analysis (EFA) tool with a Picosecond Imaging Circuit Analysis (PICA) detector with enhanced sensitivity for discussing Time Resolved Emission (TRE). The key applications where the time-resolved imaging capability is very effective in reducing the debug time and improving the understanding the failure behaviors of VLSI chip for fault characteristics, especially the use of SIL(Solid Immersion Lens).\",\"PeriodicalId\":186529,\"journal\":{\"name\":\"2021 China Semiconductor Technology International Conference (CSTIC)\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-03-14\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2021 China Semiconductor Technology International Conference (CSTIC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/CSTIC52283.2021.9461429\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 China Semiconductor Technology International Conference (CSTIC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CSTIC52283.2021.9461429","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Picosecond Imaging Circuit Analysis of CMOS Circuits Using SIL Measurement
As a process node is getting smaller, the types of failure mechanisms are increasing. New EFA technologies and methods are constantly development. One of the main changes EFA analyses is an enhancement of dynamic EFA in circuit failed in functional test. We propose a technique for advanced Electrical Failure Analysis (EFA) tool with a Picosecond Imaging Circuit Analysis (PICA) detector with enhanced sensitivity for discussing Time Resolved Emission (TRE). The key applications where the time-resolved imaging capability is very effective in reducing the debug time and improving the understanding the failure behaviors of VLSI chip for fault characteristics, especially the use of SIL(Solid Immersion Lens).