Y. Igaku, S. Matsui, H. Ishigaki, H. Hiroshima, M. Komuro, S. Yamanaka, T. Nagamura
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Compact imprint system using driving power of stepping motor
In this paper, we report on a newly developed step-and-repeat nano-imprint-lithography (NIL) system using driving power of stepping motor which has advantages that the system size is small and the precise control is possible by using a stepping motor instead of a hydraulic press. We have developed a compact imprint lithography system and demonstrated replication of 1 /spl mu/m patterns as preliminary experiment. Nanometer patterns and details of several key operating parameters will be discussed.
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