用于图像传感器件的曲面纳米金字塔宽带抗反射

A. Shrestha, Genki Mizuno, Patrick Oduor, A. Dutta, N. Dhar
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引用次数: 4

摘要

成像器件中的反射损耗是主要缺陷之一,它会降低效率,导致响应性降低。由于反射光不再可以转化为电子,因此尽可能减少设备顶表面的反射是非常重要的。开发了四分之一波长和双折射率增透(AR)涂层来减少反射;然而,这些AR涂层是波长相关的,在宽带范围内不能有效地发挥作用。试图通过堆叠多指数AR层来制造宽带波长的AR涂层,导致更厚且昂贵的解决方案,但仍然不能在所有所需波长提供适当的抗反射。此外,AR涂层的使用增加了设备的材料和制造成本。我们提出了一种新的纳米结构,该结构使器件的折射率与自由空间的折射率相匹配,以减少来自顶部表面的反射,从而消除了AR涂层的使用,从而降低了器件成本。仿真结果表明,所提出的纳米结构有效地消除了可见光、中波红外(MWIR)、短波红外(SWIR)等所需波长的宽带频谱上的反射损耗,开辟了各种应用机会。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Broadband antireflection with curved surface nano-pyramids for image sensing devices
The reflection loss in imaging devices is one of the major drawbacks, which degrades efficiency resulting in lower responsivity. Since the reflected light is no longer available for conversion into electrons, it is very important to reduce the reflection from the top surface of the device as much as possible. Quarter wavelength and two index antireflection (AR) coatings have been developed to reduce reflection; however, these AR coatings are wavelength dependent and have not performed effectively in a broadband range. Attempts to make AR coating for broadband wavelengths by stacking multiple index AR layers result in thicker and expensive solutions, which still do not provide proper antireflection at all desired wavelengths. Moreover, the usage of AR coatings escalates material and fabrication costs of the device. We propose a novel nanostructure, which matches the refractive index of the device to that of free space to reduce reflection from the top surface, eliminating the use of AR coatings and hence reducing the device cost. It is shown via simulation that the proposed nanostructure effectively eliminates the reflection loss over the broadband spectrum of desired wavelengths e.g. Visible, Mid-wave IR (MWIR), Short-wave IR (SWIR) spectrums, opening various application opportunities.
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