嵌入式三维微组件制造工艺流程研究

S. Kruchinin, S. Timoshenkov
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引用次数: 1

摘要

内部安装技术是在功能无线电电子模块衬底结构中安装开模。这种方法不需要对微电路进行封装,因为封装任务是在微电子产品基板上进行的。作为微电子产品的工作表面,我们有大量的材料可供选择。例如,为了生产柔性板,聚酰亚胺等聚合物材料被积极使用。这种材料的特点是在组成、结构和性能方面具有广泛的调节可能性。内部安装技术意味着将开模嵌入到聚合物材料中,然后对开模接触垫(CP)进行蚀刻,并且增加了集成3D设计的能力,将在许多参数方面显着改善该技术。此外,柔性材料允许开发复杂形状的微型组件,这是强大产品开发及其随后在难以到达的位置安装的重要优势之一。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Investigation of technological operations for manufacturing 3D micro-assemblies with embedded elements
The internal mounting technology is the mounting of open-dies in a functional radio-electronic module substrate structure. This method does not require the microcircuits packaging, since the package task carry out the microelectronic product substrate. As a working surface for a microelectronic product today we have a huge selection of materials. For example, to produce flexible boards, polymer materials such as polyimides are actively used. That material is characterized by wide regulation possibilities of composition, structure and properties. The internal mounting technology implies the open-dies embedding into the polymer material, followed by etching to the open-die contact pad (CP), and the added ability to integrate 3D design will significantly improve the technology in many parameters. In addition, flexible materials allow the development of complex-shaped micro-assemblies, which is one of the important advantages in a powerful products development and their subsequent installation in hard-to-reach spots.
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