{"title":"三维共聚焦扫描显微镜，采用MEMS反射镜进行横向扫描，MEMS透镜扫描仪进行深度扫描","authors":"Lin Liu, Huikai Xie","doi":"10.1109/OMEMS.2012.6318851","DOIUrl":null,"url":null,"abstract":"We present a three-dimensional confocal scanning microscope using MEMS scanners for both the lateral and the axial scan. The lateral scan is performed by an electrothermal two-axis MEMS mirror that is capable of scanning large angles up to ± 20° at low driving voltages less than 4.5 V. The depth scan is accomplished by an electrothermal lens scanner with a large tunable range of 475 μm at 3 V. 2D and 3D confocal images have been obtained by this system.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Three-dimensional confocal scanning microscope using an MEMS mirror for lateral scan and an MEMS lens scanner for depth scan\",\"authors\":\"Lin Liu, Huikai Xie\",\"doi\":\"10.1109/OMEMS.2012.6318851\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We present a three-dimensional confocal scanning microscope using MEMS scanners for both the lateral and the axial scan. The lateral scan is performed by an electrothermal two-axis MEMS mirror that is capable of scanning large angles up to ± 20° at low driving voltages less than 4.5 V. The depth scan is accomplished by an electrothermal lens scanner with a large tunable range of 475 μm at 3 V. 2D and 3D confocal images have been obtained by this system.\",\"PeriodicalId\":347863,\"journal\":{\"name\":\"2012 International Conference on Optical MEMS and Nanophotonics\",\"volume\":\"5 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-10-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2012 International Conference on Optical MEMS and Nanophotonics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMEMS.2012.6318851\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 International Conference on Optical MEMS and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2012.6318851","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Three-dimensional confocal scanning microscope using an MEMS mirror for lateral scan and an MEMS lens scanner for depth scan
We present a three-dimensional confocal scanning microscope using MEMS scanners for both the lateral and the axial scan. The lateral scan is performed by an electrothermal two-axis MEMS mirror that is capable of scanning large angles up to ± 20° at low driving voltages less than 4.5 V. The depth scan is accomplished by an electrothermal lens scanner with a large tunable range of 475 μm at 3 V. 2D and 3D confocal images have been obtained by this system.
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