通过规划3D集成电路实现层间性能最大化

Jun Lu, Song Chen, T. Yoshimura
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引用次数: 4

摘要

随着半导体工业的发展,3D集成电路技术因其在缓解特征尺寸变小和集成密度增大所带来的互连问题方面的优势而被引入。在3D集成电路制造中,关键挑战之一是不同器件层之间的垂直连接,这可以通过层间通孔实现。在本文中,我们通过规划方法提出了一种性能最大化的3D集成电路(多器件层)中间层,可用于后平面规划阶段。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Performance maximized interlayer via planning for 3D ICs
As the development of semiconductor industry, 3D IC technology is introduced for its advantages in alleviating the interconnect problem coming with decreasing feature size and increasing integrated density. In 3D IC fabrication, one of the key challenges is the vertical connections between different device layers, which can be implemented by interlayer vias. In this paper, we proposed a performance-maximized interlayer via planning method for 3D ICs (multiple device layers), which can be used in the post-floorplanning stage.
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