用于MEMS惯性传感器的多通道电容读出集成电路

2008 International SoC Design Conference Pub Date : 2008-11-01 DOI:10.1109/SOCDC.2008.4815731

W. Bahn, H. Ko, Cheolkyu Han, Sangyoon Lee, D. Jeong, D. Cho, Taedong Ahn, Kwangho Yoo

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引用次数: 0

摘要

提出了一种用于微机电系统惯性传感器的多通道电容读出集成电路。设计了一种全差分、斩波稳定SC(开关电容)三通道电荷放大器。数字解调器和抽取器用于防止传统模拟乘法器的问题。采用MEMS传感元件对集成电路的性能进行了评价。

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Multi-channel capacitive readout IC for MEMS inertial sensors

A multi-channel capacitive readout IC (integrated-circuit) for MEMS (microelectromechanical systems) inertial sensor is presented. A fully differential, chopper-stabilized SC (switched capacitor) 3-channel charge amplifier is designed. A digital demodulator and a decimator are used to prevent problems of conventional analog multipliers. Performance of the fabricated IC is evaluated with MEMS sensing elements.

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2008 International SoC Design Conference

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