砷化镓发光二极管晶圆厂的“绿色”工艺和生产率改进

Proceedings of the 1995 IEEE International Symposium on Electronics and the Environment ISEE (Cat. No.95CH35718) Pub Date : 1995-05-01 DOI:10.1109/ISEE.1995.514985

K. Evans, T. Alcorn, P. Hadizad, K. Edwards, R. Fischer, D. Nielsen, F. Richie, N. Saha

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引用次数: 0

摘要

成立了一个自我指导的工艺改进小组，以简化砷化镓发光二极管(LED)晶圆工艺流程并提高产品产量。这项研究提高了砷化镓LED晶圆加工产量的“绿色”效益包括消除了大量的化学加工步骤。通过使用更少、更温和的化学品，新工艺更加环保。因此，晶圆生产提高了产量，并降低了成本，由于化学品的使用水平较低。

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"Green" process and productivity improvements in a GaAs light emitting diode wafer fab

A self directed process improvement team was initiated to streamline the GaAs light emitting diode (LED) wafer process flow and enhance product yields. "Green" benefits of this study to improve GaAs LED wafer processing yields included the elimination of a significant number of chemical processing steps. The new process is more environmentally "friendly" through the use of fewer and "milder" chemicals. Thus wafer production is enhanced with both a yield increase and a cost decrease due to lower levels of chemical usage.

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Proceedings of the 1995 IEEE International Symposium on Electronics and the Environment ISEE (Cat. No.95CH35718)

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