Characterisation of MEMs mirrors for use in atmospheric and ocular wavefront correction

The Applied Optics group at the National University of Ireland, Galway, is engaged in research into various aspects of the application of adaptive optics to both ocular and atmospheric wavefront correction. A large number of commercially available deformable mirrors have been selected by the group for AO experiments, and these mirrors have been carefully characterised to determine their suitability for these tasks. In this paper we describe the approach we have used in characterising deformable mirrors and present results for several MEMs mirrors, including membrane mirrors from AgilOptics and Flexible Optical BV, a segmented micromirror from IrisAO and a 140-actuator mirror from Boston micromachines.