低成本硅湿蚀刻技术制备倒刺微针尖阵列

Shu-Wei Tung, Che-Hsi Kuo, Li-Sheng Hsu, Y. Yang
{"title":"低成本硅湿蚀刻技术制备倒刺微针尖阵列","authors":"Shu-Wei Tung, Che-Hsi Kuo, Li-Sheng Hsu, Y. Yang","doi":"10.1109/TRANSDUCERS.2013.6626945","DOIUrl":null,"url":null,"abstract":"This work presents the fabrication of barbed microtip arrays which utilizes the techniques of silicon wet etching. The KOH anisotropic wet etching was employed to form standard pyramidal microtip arrays, and HF/HNO3 isotropic etching was used to create barbs on those microtips. Experimental results show that the forces for detaching the barbed microtip arrays from a human skin, a PDMS polymer, and a PVC film are larger than the forces for the microtip arrays without barbs. The proposed barbed microtip arrays can be employed as the dry electroencephalogram (EEG) electrodes.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"9 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Fabricating barbed microtip arrays by low-cost silicon wet etching techniques\",\"authors\":\"Shu-Wei Tung, Che-Hsi Kuo, Li-Sheng Hsu, Y. Yang\",\"doi\":\"10.1109/TRANSDUCERS.2013.6626945\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This work presents the fabrication of barbed microtip arrays which utilizes the techniques of silicon wet etching. The KOH anisotropic wet etching was employed to form standard pyramidal microtip arrays, and HF/HNO3 isotropic etching was used to create barbs on those microtips. Experimental results show that the forces for detaching the barbed microtip arrays from a human skin, a PDMS polymer, and a PVC film are larger than the forces for the microtip arrays without barbs. The proposed barbed microtip arrays can be employed as the dry electroencephalogram (EEG) electrodes.\",\"PeriodicalId\":202479,\"journal\":{\"name\":\"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)\",\"volume\":\"9 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-06-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/TRANSDUCERS.2013.6626945\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/TRANSDUCERS.2013.6626945","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2

摘要

这项工作提出了利用硅湿蚀刻技术制造倒刺微针尖阵列。采用KOH各向异性湿法刻蚀形成标准锥体微针尖阵列,采用HF/HNO3各向同性刻蚀在微针尖上形成倒刺。实验结果表明,有倒刺的微针尖阵列与人体皮肤、PDMS聚合物和PVC膜分离时所受的力大于无倒刺的微针尖阵列所受的力。所提出的倒刺微针尖阵列可以作为干式脑电图电极。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Fabricating barbed microtip arrays by low-cost silicon wet etching techniques
This work presents the fabrication of barbed microtip arrays which utilizes the techniques of silicon wet etching. The KOH anisotropic wet etching was employed to form standard pyramidal microtip arrays, and HF/HNO3 isotropic etching was used to create barbs on those microtips. Experimental results show that the forces for detaching the barbed microtip arrays from a human skin, a PDMS polymer, and a PVC film are larger than the forces for the microtip arrays without barbs. The proposed barbed microtip arrays can be employed as the dry electroencephalogram (EEG) electrodes.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信