{"title":"低成本硅湿蚀刻技术制备倒刺微针尖阵列","authors":"Shu-Wei Tung, Che-Hsi Kuo, Li-Sheng Hsu, Y. Yang","doi":"10.1109/TRANSDUCERS.2013.6626945","DOIUrl":null,"url":null,"abstract":"This work presents the fabrication of barbed microtip arrays which utilizes the techniques of silicon wet etching. The KOH anisotropic wet etching was employed to form standard pyramidal microtip arrays, and HF/HNO3 isotropic etching was used to create barbs on those microtips. Experimental results show that the forces for detaching the barbed microtip arrays from a human skin, a PDMS polymer, and a PVC film are larger than the forces for the microtip arrays without barbs. The proposed barbed microtip arrays can be employed as the dry electroencephalogram (EEG) electrodes.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"9 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Fabricating barbed microtip arrays by low-cost silicon wet etching techniques\",\"authors\":\"Shu-Wei Tung, Che-Hsi Kuo, Li-Sheng Hsu, Y. Yang\",\"doi\":\"10.1109/TRANSDUCERS.2013.6626945\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This work presents the fabrication of barbed microtip arrays which utilizes the techniques of silicon wet etching. The KOH anisotropic wet etching was employed to form standard pyramidal microtip arrays, and HF/HNO3 isotropic etching was used to create barbs on those microtips. Experimental results show that the forces for detaching the barbed microtip arrays from a human skin, a PDMS polymer, and a PVC film are larger than the forces for the microtip arrays without barbs. The proposed barbed microtip arrays can be employed as the dry electroencephalogram (EEG) electrodes.\",\"PeriodicalId\":202479,\"journal\":{\"name\":\"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)\",\"volume\":\"9 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-06-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/TRANSDUCERS.2013.6626945\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/TRANSDUCERS.2013.6626945","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Fabricating barbed microtip arrays by low-cost silicon wet etching techniques
This work presents the fabrication of barbed microtip arrays which utilizes the techniques of silicon wet etching. The KOH anisotropic wet etching was employed to form standard pyramidal microtip arrays, and HF/HNO3 isotropic etching was used to create barbs on those microtips. Experimental results show that the forces for detaching the barbed microtip arrays from a human skin, a PDMS polymer, and a PVC film are larger than the forces for the microtip arrays without barbs. The proposed barbed microtip arrays can be employed as the dry electroencephalogram (EEG) electrodes.