Comprehensive optimization of an XY nano positioning stage with flexure-hinges and lever mechanisms

Concerning compliant micro-positioning stage adopting flexure hinges with lever magnifying mechanism, aiming at performance of as large motion space, little parasitic motion and high response bandwidth, a series measures for optimization design are proposed to balance the lever magnification ratio and parasitic motion coupling ratio, based on comparative analysis of eighty sets of design schemes. Then, those proposed optimization measures were implemented to design a compliant XY nano positioning stage. FEM analyses in ANSYS software were adopted to verify the minimum parasitic motion effects and guarantee the workspace, as while as static and dynamic performances of the stage. The magnifying ratios of the optimized stage in X and Y axis achieve 5.0580 and 5.1351 respectively, while parasitic motion ratio is decreased to 0.003. The 1st natural frequency of the manipulator is 582.01Hz, while its rise time of step response is less than 0.0005s.