量子级联激光器的x射线衍射分析

2009 IEEE International Conference on Indium Phosphide & Related Materials Pub Date : 2009-05-10 DOI:10.1109/ICIPRM.2009.5012507

L. Cheng, Ruth Choa, J. Khurgin, F. Choa, Xingbo Chen, Xiaojun Wang, J. Fan, Jianxin Chen, C. Gmachl

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引用次数: 0

摘要

量子级联激光器(qcl)的生长质量很难表征，因为所有的> 1000纳米超晶格结构对异质界面质量和厚度控制都有很高的要求。在这项工作中，我们使用x射线衍射(XRD)来有效地评估qcl晶圆的生长。

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X-ray diffraction analysis of quantum cascdse lasers

Growth quality of quantum-cascade-lasers (QCLs) is difficult to be characterized due to the demanding requirements on hetero-interface quality and thickness control for all ≫1000 nano-scale superlattice stucture. In this work we employ X-ray diffractometry (XRD) to effectively evaluate QCL-wafer growths.

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2009 IEEE International Conference on Indium Phosphide & Related Materials

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