如何同时减少/spl α /和/spl β /误差与SPC?多变量过程控制方法

IEEE/SEMI 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (Cat. No.98CH36168) Pub Date : 1998-09-23 DOI:10.1109/ASMC.1998.731373

R. Nasongkhla, J. Shanthikumar, R. Nurani, M. McIntyre

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引用次数: 0

摘要

我们描述了多元统计过程控制方法，该方法使用加权平均度量作为绘制在控制图上的度量。我们证明了最优加权系数是均值位移向量和感兴趣度量的协方差矩阵的函数。由该最优加权平均度量构建的控制图将具有最高的信噪比和最低的/spl alpha/和/spl beta/误差。文中还给出了利用某厂实际数据的数值算例。

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How to simultaneously reduce /spl alpha/ and /spl beta/ error with SPC? A multivariate process control approach

We describe the multivariate statistical process control approach which uses a weighted average metric as a metric plotted on a control chart. We show that the optimal weighted coefficient is a function of the mean-shift vector and covariance matrix of metrics of interest. The control chart constructed by this optimal weighted average metric will have the highest signal to noise ratio and the lowest /spl alpha/ and /spl beta/ errors. A numerical example using actual data from a fab is also provided.

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IEEE/SEMI 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (Cat. No.98CH36168)

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