射频应用中的MEMS解决方案

2013 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S) Pub Date : 2013-10-01 DOI:10.1109/S3S.2013.6716536

V. Joshi, R. Parkhurst, L. Morrell, P. Tornatta

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引用次数: 2

摘要

MEMS器件是理想的调谐元件，因为在非50欧姆系统中，等效串联电阻(ESR)是调谐系统损耗的主要来源。MEMS的ESR不到固态器件的20%，与最好的固定值无源元件相当。图2显示了卡文迪什射频MEMS器件在频率范围和相关电容状态下的可用Q值。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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MEMS Solutions in RF applications

MEMS devices are ideal tuning element since in a non-50 Ohm system, equivalent series resistance (ESR) is the primary source of losses in a tuning system. MEMS have less than 20% of the ESR of solid state devices and are on par with the best fixed-value passive components. Figure 2 shows the usable Q of Cavendish RF MEMS device for the frequency range and associated capacitance state.

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2013 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S)

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