MEMS的设计与测试

Proceedings Twelfth International Conference on VLSI Design. (Cat. No.PR00013) Pub Date : 1999-01-10 DOI:10.1109/ICVD.1999.745160

B. Courtois, J. Karam, S. Mir, M. Lubaszewski, V. Székely, M. Rencz, K. Hofmann, M. Glesner

{"title":"MEMS的设计与测试","authors":"B. Courtois, J. Karam, S. Mir, M. Lubaszewski, V. Székely, M. Rencz, K. Hofmann, M. Glesner","doi":"10.1109/ICVD.1999.745160","DOIUrl":null,"url":null,"abstract":"This paper deals with design, simulation and test of MEMS (microelectromechanical systems). Both existing tools and open research areas are addressed. An appropriate Computer-Aided Design (CAD) environment is presented. Similarities between the present development of MEMS and the development of microelectronics decades ago are pointed out, including the migration from point tools to CAD frameworks, testing and intellectual property (IP) issues.","PeriodicalId":443373,"journal":{"name":"Proceedings Twelfth International Conference on VLSI Design. (Cat. No.PR00013)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-01-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"Design and test of MEMS\",\"authors\":\"B. Courtois, J. Karam, S. Mir, M. Lubaszewski, V. Székely, M. Rencz, K. Hofmann, M. Glesner\",\"doi\":\"10.1109/ICVD.1999.745160\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper deals with design, simulation and test of MEMS (microelectromechanical systems). Both existing tools and open research areas are addressed. An appropriate Computer-Aided Design (CAD) environment is presented. Similarities between the present development of MEMS and the development of microelectronics decades ago are pointed out, including the migration from point tools to CAD frameworks, testing and intellectual property (IP) issues.\",\"PeriodicalId\":443373,\"journal\":{\"name\":\"Proceedings Twelfth International Conference on VLSI Design. (Cat. No.PR00013)\",\"volume\":\"10 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1999-01-10\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings Twelfth International Conference on VLSI Design. (Cat. No.PR00013)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICVD.1999.745160\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings Twelfth International Conference on VLSI Design. (Cat. No.PR00013)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICVD.1999.745160","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 5

摘要

本文主要研究微机电系统的设计、仿真和测试。讨论了现有工具和开放的研究领域。提出了一种合适的计算机辅助设计(CAD)环境。指出了目前MEMS的发展与几十年前微电子技术的发展之间的相似之处，包括从点工具到CAD框架的迁移，测试和知识产权(IP)问题。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Design and test of MEMS

This paper deals with design, simulation and test of MEMS (microelectromechanical systems). Both existing tools and open research areas are addressed. An appropriate Computer-Aided Design (CAD) environment is presented. Similarities between the present development of MEMS and the development of microelectronics decades ago are pointed out, including the migration from point tools to CAD frameworks, testing and intellectual property (IP) issues.

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来源期刊

Proceedings Twelfth International Conference on VLSI Design. (Cat. No.PR00013)

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