通过网格限制溅射锡面积对锡晶须的影响

Zekun Wang, G. Flowers, M. Bozack
{"title":"通过网格限制溅射锡面积对锡晶须的影响","authors":"Zekun Wang, G. Flowers, M. Bozack","doi":"10.1109/HLM49214.2020.9307860","DOIUrl":null,"url":null,"abstract":"An important question in Sn whisker research concerns the role of lateral Sn diffusion in the film to the whisker root, providing the feedstock for whisker growth. In an elegant tracer experiment on diffusion in Sn films, Woodrow (2006) observed lateral atomic Sn diffusion over distances of hundreds and thousands of microns through Sn grain boundaries during whisker growth. In this work, we examine the effect of limiting the lateral extent of the Sn feedstock available during whiskering by employing extremely thin, micron-sized patterned Sn deposits, and compare to whisker growth from an comparatively large, essentially infinite (1cm x 1cm) thin Sn film. A series of metal, mesh grids of varying sizes were used as masks to define the area of sputtered tin deposited on Si substrates. The defined areas were primarily in the form of squares, with sizes ranging from7.5µm x 7.5µm to 153µm x 153µm. Sample areas also included 2 circles, with radii of 1µm and 4µm, and a rectangular strip with dimensions 46µm x 3000µm. A thickness of ~500Å of sputtered Sn was deposited on each specimen. The samples were subsequently incubated for 34 days under three incubation conditions: 23oC (isothermal); 100oC (isothermal); and thermal cycling over -40oCoC. Characteristically, higher whisker densities were observed as the patterned Sn area size increased, e.g., the 153µm patterns had ~ 3X more whiskers compared to the 23µm patterns under the same incubation conditions. There was a discontinuous transition in whisker density at the smallest patterned area sizes, with few whiskers found on the 7.5µm-23µm dimensioned square patterns and no whiskers found on the 1µm and 4µm patterns. Further, the whiskers obtained from micron-size areas of sputtered Sn are predominantly hillock in nature, in contrast to the high-aspect ratio whiskers normally grown from sputtered Sn on Si using standard sized films (1cm2) under identical growth conditions.","PeriodicalId":268345,"journal":{"name":"2020 IEEE 66th Holm Conference on Electrical Contacts and Intensive Course (HLM)","volume":"55 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-09-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"The Influence of Limitation of Sputtered Tin Area Through Mesh Grids on Sn Whiskering\",\"authors\":\"Zekun Wang, G. Flowers, M. Bozack\",\"doi\":\"10.1109/HLM49214.2020.9307860\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"An important question in Sn whisker research concerns the role of lateral Sn diffusion in the film to the whisker root, providing the feedstock for whisker growth. In an elegant tracer experiment on diffusion in Sn films, Woodrow (2006) observed lateral atomic Sn diffusion over distances of hundreds and thousands of microns through Sn grain boundaries during whisker growth. In this work, we examine the effect of limiting the lateral extent of the Sn feedstock available during whiskering by employing extremely thin, micron-sized patterned Sn deposits, and compare to whisker growth from an comparatively large, essentially infinite (1cm x 1cm) thin Sn film. A series of metal, mesh grids of varying sizes were used as masks to define the area of sputtered tin deposited on Si substrates. The defined areas were primarily in the form of squares, with sizes ranging from7.5µm x 7.5µm to 153µm x 153µm. Sample areas also included 2 circles, with radii of 1µm and 4µm, and a rectangular strip with dimensions 46µm x 3000µm. A thickness of ~500Å of sputtered Sn was deposited on each specimen. The samples were subsequently incubated for 34 days under three incubation conditions: 23oC (isothermal); 100oC (isothermal); and thermal cycling over -40oCoC. Characteristically, higher whisker densities were observed as the patterned Sn area size increased, e.g., the 153µm patterns had ~ 3X more whiskers compared to the 23µm patterns under the same incubation conditions. There was a discontinuous transition in whisker density at the smallest patterned area sizes, with few whiskers found on the 7.5µm-23µm dimensioned square patterns and no whiskers found on the 1µm and 4µm patterns. Further, the whiskers obtained from micron-size areas of sputtered Sn are predominantly hillock in nature, in contrast to the high-aspect ratio whiskers normally grown from sputtered Sn on Si using standard sized films (1cm2) under identical growth conditions.\",\"PeriodicalId\":268345,\"journal\":{\"name\":\"2020 IEEE 66th Holm Conference on Electrical Contacts and Intensive Course (HLM)\",\"volume\":\"55 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-09-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2020 IEEE 66th Holm Conference on Electrical Contacts and Intensive Course (HLM)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/HLM49214.2020.9307860\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 IEEE 66th Holm Conference on Electrical Contacts and Intensive Course (HLM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/HLM49214.2020.9307860","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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摘要

锡晶须研究中的一个重要问题是锡在薄膜中向晶须根部横向扩散的作用,为晶须生长提供原料。Woodrow(2006)在一个关于锡薄膜扩散的优雅示踪实验中,观察到在晶须生长过程中,锡原子沿锡晶界横向扩散了数百微米和数千微米的距离。在这项工作中,我们通过使用极薄的、微米级的图案锡沉积,研究了在晶须生成过程中限制锡原料横向范围的影响,并与相对较大的、基本上无限的(1cm x 1cm)锡薄膜的晶须生长进行了比较。一系列不同尺寸的金属网格被用作掩模来定义沉积在Si衬底上的溅射锡的区域。定义的区域主要是正方形的形式,尺寸范围从7.5微米x 7.5微米到153微米x 153微米。样本区域还包括2个半径为1微米和4微米的圆圈,以及一个尺寸为46微米x 3000微米的矩形带。在每个试样上沉积了~500Å厚度的溅射锡。样品随后在三种孵育条件下孵育34天:23℃(等温);100 oc(等温);在-40摄氏度的温度下进行热循环。随着图案Sn面积的增大,晶须密度增加,例如,在相同的孵育条件下,153µm图案的晶须比23µm图案的晶须多约3倍。在最小的图案面积上,晶须密度发生了不连续的转变,在7.5µm-23µm尺寸的正方形图案上几乎没有发现晶须,而在1µm和4µm尺寸的图案上没有发现晶须。此外,从微米大小的溅射锡区获得的晶须主要是丘陵性质的,与在相同生长条件下使用标准尺寸的薄膜(1cm2)在Si上溅射锡通常生长的高纵横比晶须形成对比。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The Influence of Limitation of Sputtered Tin Area Through Mesh Grids on Sn Whiskering
An important question in Sn whisker research concerns the role of lateral Sn diffusion in the film to the whisker root, providing the feedstock for whisker growth. In an elegant tracer experiment on diffusion in Sn films, Woodrow (2006) observed lateral atomic Sn diffusion over distances of hundreds and thousands of microns through Sn grain boundaries during whisker growth. In this work, we examine the effect of limiting the lateral extent of the Sn feedstock available during whiskering by employing extremely thin, micron-sized patterned Sn deposits, and compare to whisker growth from an comparatively large, essentially infinite (1cm x 1cm) thin Sn film. A series of metal, mesh grids of varying sizes were used as masks to define the area of sputtered tin deposited on Si substrates. The defined areas were primarily in the form of squares, with sizes ranging from7.5µm x 7.5µm to 153µm x 153µm. Sample areas also included 2 circles, with radii of 1µm and 4µm, and a rectangular strip with dimensions 46µm x 3000µm. A thickness of ~500Å of sputtered Sn was deposited on each specimen. The samples were subsequently incubated for 34 days under three incubation conditions: 23oC (isothermal); 100oC (isothermal); and thermal cycling over -40oCoC. Characteristically, higher whisker densities were observed as the patterned Sn area size increased, e.g., the 153µm patterns had ~ 3X more whiskers compared to the 23µm patterns under the same incubation conditions. There was a discontinuous transition in whisker density at the smallest patterned area sizes, with few whiskers found on the 7.5µm-23µm dimensioned square patterns and no whiskers found on the 1µm and 4µm patterns. Further, the whiskers obtained from micron-size areas of sputtered Sn are predominantly hillock in nature, in contrast to the high-aspect ratio whiskers normally grown from sputtered Sn on Si using standard sized films (1cm2) under identical growth conditions.
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