{"title":"主动对准的光纤开关装置","authors":"Y. Peter, H. Herzig, S. Bottinelli","doi":"10.1117/12.341275","DOIUrl":null,"url":null,"abstract":"The alignment of optical elements in a MOEMS, is of prime importance in order to realize a reliable and low loss system. Fabrication errors or temperature changes deteriorate the alignment accuracy. These errors can be compensated with the aid of an active alignment system. The aim of the paper is to investigate an active system in order to align microlenses and fibers within a system. A high lateral precision is required for single mode fiber injection, typically better than 1 micrometers . With the active alignment system we can correct a misalignment of +/- 6 micrometers .","PeriodicalId":318748,"journal":{"name":"Design, Test, Integration, and Packaging of MEMS/MOEMS","volume":"51 5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-03-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Optical fiber switching device with active alignment\",\"authors\":\"Y. Peter, H. Herzig, S. Bottinelli\",\"doi\":\"10.1117/12.341275\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The alignment of optical elements in a MOEMS, is of prime importance in order to realize a reliable and low loss system. Fabrication errors or temperature changes deteriorate the alignment accuracy. These errors can be compensated with the aid of an active alignment system. The aim of the paper is to investigate an active system in order to align microlenses and fibers within a system. A high lateral precision is required for single mode fiber injection, typically better than 1 micrometers . With the active alignment system we can correct a misalignment of +/- 6 micrometers .\",\"PeriodicalId\":318748,\"journal\":{\"name\":\"Design, Test, Integration, and Packaging of MEMS/MOEMS\",\"volume\":\"51 5 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1999-03-10\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Design, Test, Integration, and Packaging of MEMS/MOEMS\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.341275\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Design, Test, Integration, and Packaging of MEMS/MOEMS","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.341275","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Optical fiber switching device with active alignment
The alignment of optical elements in a MOEMS, is of prime importance in order to realize a reliable and low loss system. Fabrication errors or temperature changes deteriorate the alignment accuracy. These errors can be compensated with the aid of an active alignment system. The aim of the paper is to investigate an active system in order to align microlenses and fibers within a system. A high lateral precision is required for single mode fiber injection, typically better than 1 micrometers . With the active alignment system we can correct a misalignment of +/- 6 micrometers .
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