{"title":"利用全息光刻技术制备高旋转对称性的二维和三维光子准晶体","authors":"C. Hsu, N. D. Lai, J. Lin","doi":"10.1109/OMEMS.2008.4607878","DOIUrl":null,"url":null,"abstract":"We demonstrate using a double-exposure three-beam and/or three-beam-plus-one interference technique, one can easily and efficiently fabricate 2D and/or 3D quasi-periodic structures. Using the multi-surface prism, our fabrication technique becomes a compact and robust way to produce different kinds of structures, periodic or quasi-periodic.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Fabrication of 2D and 3D photonic quasi-crystals with high rotation symmetry by holographic lithography technique\",\"authors\":\"C. Hsu, N. D. Lai, J. Lin\",\"doi\":\"10.1109/OMEMS.2008.4607878\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We demonstrate using a double-exposure three-beam and/or three-beam-plus-one interference technique, one can easily and efficiently fabricate 2D and/or 3D quasi-periodic structures. Using the multi-surface prism, our fabrication technique becomes a compact and robust way to produce different kinds of structures, periodic or quasi-periodic.\",\"PeriodicalId\":402931,\"journal\":{\"name\":\"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-08-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMEMS.2008.4607878\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2008.4607878","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Fabrication of 2D and 3D photonic quasi-crystals with high rotation symmetry by holographic lithography technique
We demonstrate using a double-exposure three-beam and/or three-beam-plus-one interference technique, one can easily and efficiently fabricate 2D and/or 3D quasi-periodic structures. Using the multi-surface prism, our fabrication technique becomes a compact and robust way to produce different kinds of structures, periodic or quasi-periodic.
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