Bio-MEMS cantilever sensor design and analysis for detecting multiple diseases

Micro Electro-Mechanical Systems consists both electrical and mechanical functions and this devices undergo micro fabrication when this micro fabricated devices are used in Bio-medical field then it is called Bio-MEMS. In this paper, MEMS sensor with multiple cantilever beams is designed which detects multiple diseases at the same time. The cantilever beam surface is coated with antibodies, which recognize the foreign agents in body. An antigen is added to the beams as a result there is increase in mass due to which beam deflects. Intellisuite software is used for finding the static mode where as frequency analysis can be done by using matlab. Detecting the disease through Cantilever sensing gives faster results compared with traditional method like ELISA and PCR.