微流体装置快速成型的微铣削工艺

Muhammad Syafiq Rahim, A. Ehsan
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引用次数: 2

摘要

微铣削工艺已成为微器件快速成型的一种有吸引力的方法。该工艺基于减法制造方法,其中从样品中选择性地去除材料。本文综述了利用微铣削工艺制备圆形和矩形横截面微流控器件的研究进展。工艺和加工参数,如微刀具的选择,主轴转速,切削深度,进给速度和工艺优化策略将进行审查。给出了利用数控微铣削工艺快速制造通道宽度为200um、通道深度为50um的微流式细胞仪矩形截面通道的实例研究。实验制作了粗糙度为20 nm的低表面粗糙度微通道,并演示了一种可产生聚焦宽度约为60 um的流体动力聚焦的微流式细胞仪装置。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Micro Milling Process for the Rapid Prototyping of Microfluidic Devices
Micro milling process has become an attractive method for the rapid prototyping of micro devices. The process is based on subtractive manufacturing method in which materials from a sample are removed selectively. A comprehensive review on the fabrication of circular and rectangular cross-section channels of microfluidic devices using micro milling process is provided this review work. Process and machining parameters such as micro-tools selection, spindle speed, depth of cut, feed rate and strategy for process optimization will be reviewed. A case study on the rapid fabrication of a rectangular cross section channel of a microflow cytometer device with 200 um channel width and 50 um channel depth using CNC micro milling process is provided. The experimental work has produced a low surface roughness micro channel of 20 nm in roughness and demonstrated a microflow cytometer device that can produce hydrodynamic focusing with a focusing width of about 60 um.
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