L. Kolaklieva, R. Kakanakov, T. Cholakova, H. Bahchedzhiev, V. Chitanov
{"title":"一种改进力学参数的多功能AlSiN纳米复合膜","authors":"L. Kolaklieva, R. Kakanakov, T. Cholakova, H. Bahchedzhiev, V. Chitanov","doi":"10.1109/MIEL.2019.8889603","DOIUrl":null,"url":null,"abstract":"An AlSiN film was deposited by cathodic arc evaporation. The structure and composition of the film were investigated by XRD, EDS and XPS analyses. The film had a nanocomposite structure consisting of (AlSi)N nanograins incorporated in a Si3N4 matrix. The film hardness determined by nanoindentation measurements was found to be 46 GPa. The AlSiN nanocomposite demonstrated improved elastic strain to failure (H/E=0.10), very good resistance to plastic deformation (H3/E2=0.44) and elastic recovery of 67%, which indicated improved toughness. The nanocomposite AlSiN film exhibited a low friction coefficient of 0.9 against the diamond indenter and enhanced wear resistance with wear rate of 7.56×10−10 mm3/ (N.GPa.m).","PeriodicalId":391606,"journal":{"name":"2019 IEEE 31st International Conference on Microelectronics (MIEL)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"An AlSiN Nanocomposite Film with Improved Mechanical Parameters for Multifunctional Applications\",\"authors\":\"L. Kolaklieva, R. Kakanakov, T. Cholakova, H. Bahchedzhiev, V. Chitanov\",\"doi\":\"10.1109/MIEL.2019.8889603\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"An AlSiN film was deposited by cathodic arc evaporation. The structure and composition of the film were investigated by XRD, EDS and XPS analyses. The film had a nanocomposite structure consisting of (AlSi)N nanograins incorporated in a Si3N4 matrix. The film hardness determined by nanoindentation measurements was found to be 46 GPa. The AlSiN nanocomposite demonstrated improved elastic strain to failure (H/E=0.10), very good resistance to plastic deformation (H3/E2=0.44) and elastic recovery of 67%, which indicated improved toughness. The nanocomposite AlSiN film exhibited a low friction coefficient of 0.9 against the diamond indenter and enhanced wear resistance with wear rate of 7.56×10−10 mm3/ (N.GPa.m).\",\"PeriodicalId\":391606,\"journal\":{\"name\":\"2019 IEEE 31st International Conference on Microelectronics (MIEL)\",\"volume\":\"16 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-09-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2019 IEEE 31st International Conference on Microelectronics (MIEL)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MIEL.2019.8889603\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 IEEE 31st International Conference on Microelectronics (MIEL)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MIEL.2019.8889603","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
An AlSiN Nanocomposite Film with Improved Mechanical Parameters for Multifunctional Applications
An AlSiN film was deposited by cathodic arc evaporation. The structure and composition of the film were investigated by XRD, EDS and XPS analyses. The film had a nanocomposite structure consisting of (AlSi)N nanograins incorporated in a Si3N4 matrix. The film hardness determined by nanoindentation measurements was found to be 46 GPa. The AlSiN nanocomposite demonstrated improved elastic strain to failure (H/E=0.10), very good resistance to plastic deformation (H3/E2=0.44) and elastic recovery of 67%, which indicated improved toughness. The nanocomposite AlSiN film exhibited a low friction coefficient of 0.9 against the diamond indenter and enhanced wear resistance with wear rate of 7.56×10−10 mm3/ (N.GPa.m).
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