一个完全集成的2 GHz压控振荡器与后处理铜电感

Proceedings of the IEEE 2001 Custom Integrated Circuits Conference (Cat. No.01CH37169) Pub Date : 2001-05-06 DOI:10.1109/CICC.2001.929845

J. Rogers, V. Levenets, C. Pawlowicz, N. G. Tarr, T. Smy, C. Plett

{"title":"一个完全集成的2 GHz压控振荡器与后处理铜电感","authors":"J. Rogers, V. Levenets, C. Pawlowicz, N. G. Tarr, T. Smy, C. Plett","doi":"10.1109/CICC.2001.929845","DOIUrl":null,"url":null,"abstract":"A simple post-processing technique allowing Cu inductors to be added to integrated circuits is presented. The inductors use a 4 /spl mu/m thick Cu layer, and are formed over a 9 /spl mu/m thick polyimide dielectric. VCOs with Cu inductors gave a phase noise of -106 dBc/Hz at 100 kHz offset from a 2 GHz carrier. In contrast, an identical control circuit with Al inductors gave a phase noise of only -101 dBc/Hz at 100 kHz offset from a 1.8 GHz carrier and had higher power consumption.","PeriodicalId":101717,"journal":{"name":"Proceedings of the IEEE 2001 Custom Integrated Circuits Conference (Cat. No.01CH37169)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2001-05-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"12","resultStr":"{\"title\":\"A completely integrated 2 GHz VCO with post-processed Cu inductors\",\"authors\":\"J. Rogers, V. Levenets, C. Pawlowicz, N. G. Tarr, T. Smy, C. Plett\",\"doi\":\"10.1109/CICC.2001.929845\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A simple post-processing technique allowing Cu inductors to be added to integrated circuits is presented. The inductors use a 4 /spl mu/m thick Cu layer, and are formed over a 9 /spl mu/m thick polyimide dielectric. VCOs with Cu inductors gave a phase noise of -106 dBc/Hz at 100 kHz offset from a 2 GHz carrier. In contrast, an identical control circuit with Al inductors gave a phase noise of only -101 dBc/Hz at 100 kHz offset from a 1.8 GHz carrier and had higher power consumption.\",\"PeriodicalId\":101717,\"journal\":{\"name\":\"Proceedings of the IEEE 2001 Custom Integrated Circuits Conference (Cat. No.01CH37169)\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2001-05-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"12\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of the IEEE 2001 Custom Integrated Circuits Conference (Cat. No.01CH37169)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/CICC.2001.929845\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the IEEE 2001 Custom Integrated Circuits Conference (Cat. No.01CH37169)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CICC.2001.929845","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 12

摘要

提出了一种简单的后处理技术，可以在集成电路中加入铜电感。电感使用4 /spl μ m厚的Cu层，并在9 /spl μ m厚的聚酰亚胺电介质上形成。带Cu电感的vco在2ghz载波的100khz偏移时相位噪声为-106 dBc/Hz。相比之下，具有Al电感的相同控制电路在1.8 GHz载波的100 kHz偏移时相位噪声仅为-101 dBc/Hz，并且具有更高的功耗。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

A completely integrated 2 GHz VCO with post-processed Cu inductors

A simple post-processing technique allowing Cu inductors to be added to integrated circuits is presented. The inductors use a 4 /spl mu/m thick Cu layer, and are formed over a 9 /spl mu/m thick polyimide dielectric. VCOs with Cu inductors gave a phase noise of -106 dBc/Hz at 100 kHz offset from a 2 GHz carrier. In contrast, an identical control circuit with Al inductors gave a phase noise of only -101 dBc/Hz at 100 kHz offset from a 1.8 GHz carrier and had higher power consumption.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

Proceedings of the IEEE 2001 Custom Integrated Circuits Conference (Cat. No.01CH37169)

自引率

0.00%

发文量