ZnO生长范围

R. Triboulet
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引用次数: 21

摘要

综述了氧化锌的主要物理性质,并与氮化镓的物理性质进行了比较。由于这些吸引人的性质,总结了氧化锌可以考虑的各种应用。然后对用于生长ZnO晶体和ZnO外延薄膜的不同技术进行了评述。从结构性能和电学性能两方面对结果进行了讨论。最后结合最新的研究结果讨论了p型掺杂的关键问题。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Scope of ZnO growth
The main ZnO physical properties are reviewed and some of them compared to those of GaN. As a result of these attractive properties, the various applications it could be thought of for ZnO are summarized. A critical review is then proposed of the different techniques used for the growth of bulk ZnO crystals and of ZnO epitaxial films. The result are discussed from the assessment of their structural and electrical properties. The key issue of p-type doping is finally discussed in the light of the most recent results.
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