利用高k介电介质HfO2提高CNTFET的性能

D. G. P. Hangargekar, V. Menon, A. Gajarushi
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摘要

近年来,碳纳米管以其独特的性能受到了广泛的关注,被认为是纳米电子学的未来。本文分析了不同介质(SiO2(3.9)和HfO2(25))下碳纳米管器件的特性。在相同的背栅结构和相同的氧化层厚度下,HfO2表现出比SiO2更好的电容、跨导性和离子/I关断比,后者几乎是SiO2的4-5倍,显示出优异的关断状态。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Enhancement in the performance of CNTFET by the use of high-k dielectric, HfO2
CNTs with their fascinating properties have been gathering lots of attention in the recent past for their applications as the future of nanoelectronics. This paper presents the analysis of the characteristics of CNT device for different dielectrics, namely SiO2 (3.9) and HfO2(25). HfO2 has shown better capacitance, transconductance and Ion/I off ratio than SiO2 for the same back gate structure and same thickness of oxide with the later being almost 4-5 times than in SiO2 thus indicating excellent off states.
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