扩展到3端口设备和非理想标准的Pad-open-short去嵌方法

W. Khelifi, T. Reveyrand, J. Lintignat, B. Jarry, R. Quéré, L. Lapierre, V. Armengaud, D. Langrez
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引用次数: 6

摘要

本文提出了一种将三步去嵌入(Pad-Open-Short)方法扩展到3端口器件的方法,用于精确测量晶圆上的MMIC s参数。在该方法中,根据测试夹具建立了集总元件等效电路模型。此外,由于完美的“开”和“短”标准假设,经典的Pad-Open-Short方法引入了超过20 GHz的系统误差。本文还提出了一种具有非理想标准的广义Pad-Open-Short方法。为了验证这种新方法的性能,通过对UMS工厂工作频率高达40 GHz的GaAs晶体管的模拟和测量获得了可靠的数据。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Pad-open-short de-embedding method extended for 3-port devices and non-ideal standards
This paper presents an extension of a three step de-embedding (Pad-Open-Short) method to a 3-port device for accurate on wafer MMIC S-parameters measurements. In the proposed method, an equivalent circuit-model using lumped elements is established according to the test-fixture. Furthermore, classical Pad-Open-Short method introduces systematic errors, observed beyond 20 GHz, due to perfect ‘Open’ and ‘Short’ standards assumption. This work also proposes a generalized Pad-Open-Short method with non-ideal standards. To validate the performance of this new method, reliable data were obtained from simulations and measurements of a GaAs transistor from UMS foundry operating up to 40 GHz.
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