EUV光刻深度学习模型的训练数据选择与优化

{"title":"EUV光刻深度学习模型的训练数据选择与优化","authors":"Abdalaziz Awad, Philipp Brendel, Bappaditya Dey, S. Halder, A. Erdmann","doi":"10.1117/12.2658411","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":129208,"journal":{"name":"DTCO and Computational Patterning II","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-04-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Training data selection and optimization for EUV lithography deep learning models\",\"authors\":\"Abdalaziz Awad, Philipp Brendel, Bappaditya Dey, S. Halder, A. Erdmann\",\"doi\":\"10.1117/12.2658411\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":129208,\"journal\":{\"name\":\"DTCO and Computational Patterning II\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-04-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"DTCO and Computational Patterning II\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2658411\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"DTCO and Computational Patterning II","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2658411","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}