表面重建控制外延生长n+-InSb/p-Si异质结的电学特性

K. Kimura, K. Hosotani, T. Ito, H. Shimoyama, T. Sakamoto, M. Mori, K. Maezawa
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引用次数: 0

摘要

本文讨论了InSb/Si异质结的特性。采用表面重构控制外延的方法,在p-Si衬底上生长出了InSb的薄外延层。这种外延生长技术使我们能够在Si(111)表面生长高质量的InSb。用这些样品制备了n-InSb/p-Si异质结pn二极管,并对其进行了电流电压和电容电压测量。根据这些结果估计了电导带和价带不连续,并与电子亲和规则的结果进行了比较。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Electrical characterization of n+-InSb/p-Si heterojunctions grwon by surface reconstruction controlled epitaxy
This paper discusses the characteristics of the InSb/Si heterojunctions. Thin epitaxial layers of the InSb were grown on p-Si substrate by using the surface reconstruction controlled epitaxy. This epitaxial growth technique permits us to grow high quality InSb on Si (111) surface. The n-InSb/p-Si heterojunction pn diodes were fabricated with these samples, and characterized by current-voltage, and capacitance-voltage measurements. The conduction and valence band discontinuities were estimated from these results, and they were discussed compared to those obtained from the electron affinity rule.
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